JPH037574B2 - - Google Patents

Info

Publication number
JPH037574B2
JPH037574B2 JP61066639A JP6663986A JPH037574B2 JP H037574 B2 JPH037574 B2 JP H037574B2 JP 61066639 A JP61066639 A JP 61066639A JP 6663986 A JP6663986 A JP 6663986A JP H037574 B2 JPH037574 B2 JP H037574B2
Authority
JP
Japan
Prior art keywords
arm
wafer
pulley
turntable
connecting arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61066639A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62222906A (ja
Inventor
Tsutomu Nakadai
Tsutomu Ppongo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP6663986A priority Critical patent/JPS62222906A/ja
Publication of JPS62222906A publication Critical patent/JPS62222906A/ja
Publication of JPH037574B2 publication Critical patent/JPH037574B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP6663986A 1986-03-25 1986-03-25 ウエ−ハ搬送機構 Granted JPS62222906A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6663986A JPS62222906A (ja) 1986-03-25 1986-03-25 ウエ−ハ搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6663986A JPS62222906A (ja) 1986-03-25 1986-03-25 ウエ−ハ搬送機構

Publications (2)

Publication Number Publication Date
JPS62222906A JPS62222906A (ja) 1987-09-30
JPH037574B2 true JPH037574B2 (en]) 1991-02-01

Family

ID=13321669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6663986A Granted JPS62222906A (ja) 1986-03-25 1986-03-25 ウエ−ハ搬送機構

Country Status (1)

Country Link
JP (1) JPS62222906A (en])

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0639452Y2 (ja) * 1987-08-06 1994-10-12 東京エレクトロン株式会社 ウェハ搬送用のハンドリングアーム装置
JP2926593B2 (ja) * 1988-02-12 1999-07-28 東京エレクトロン株式会社 基板処理装置及びレジスト処理装置及び基板処理方法及びレジスト処理方法
JP2519096B2 (ja) * 1988-02-12 1996-07-31 東京エレクトロン株式会社 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法
JP2607923B2 (ja) * 1988-07-29 1997-05-07 日立電子エンジニアリング 株式会社 ウェハ・ハンドリングチャック構造
JPH0825151B2 (ja) * 1988-09-16 1996-03-13 東京応化工業株式会社 ハンドリングユニット
JP2808826B2 (ja) * 1990-05-25 1998-10-08 松下電器産業株式会社 基板の移し換え装置
JPH0536809A (ja) * 1991-07-31 1993-02-12 Mitsubishi Electric Corp 半導体基板処理装置に於ける半導体基板搬送アーム
JPH05190643A (ja) * 1991-12-26 1993-07-30 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH05226453A (ja) * 1992-02-17 1993-09-03 Hitachi Ltd 真空処理装置
JPH05294410A (ja) * 1992-04-21 1993-11-09 Daifuku Co Ltd 荷保管設備
JP2739413B2 (ja) * 1993-05-26 1998-04-15 ローツェ株式会社 基板搬送用スカラ型ロボット
KR0129582B1 (ko) * 1994-06-23 1998-04-06 김주용 다중 기판 전달 장치
JP2859173B2 (ja) * 1995-08-31 1999-02-17 芝浦メカトロニクス株式会社 ロ−デイング装置
DE19549045C1 (de) * 1995-12-28 1997-06-05 Jenoptik Jena Gmbh Einrichtung zur Handhabung von scheibenförmigen Objekten
JP3249395B2 (ja) 1996-06-21 2002-01-21 東京応化工業株式会社 処理ユニット構築体
DE102006020924B4 (de) * 2006-05-05 2009-03-19 Thyssenkrupp Drauz Nothelfer Gmbh Vorrichtung zum Bearbeiten von Bauteilen, insbesondere einer Kraftfahrzeugkarosserie
DE102006020922B4 (de) 2006-05-05 2009-05-28 Thyssenkrupp Drauz Nothelfer Gmbh Vorrichtung zum Bearbeiten von Bauteilen einer Kraftfahrzeugkarosserie

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917258A (ja) * 1982-07-20 1984-01-28 Toshiba Corp 自動ウエハ試験装置
JPS6094286A (ja) * 1983-10-28 1985-05-27 株式会社日立製作所 ウエハ搬送装置
JPS60135192A (ja) * 1983-12-23 1985-07-18 名古屋機工株式会社 搬送装置
JPS60204506A (ja) * 1984-03-30 1985-10-16 Hitachi Electronics Eng Co Ltd 基板の搬出・搬入装置
JPS6138882A (ja) * 1984-07-31 1986-02-24 ぺんてる株式会社 ダブルア−ム型ロボツト

Also Published As

Publication number Publication date
JPS62222906A (ja) 1987-09-30

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